Pure high dose metal ion implantation using the plasma immersion technique

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Keyphrases

100
High Dose Keyphrases
100
Plasma Immersion Keyphrases
100
Metal Ion Implantat... Keyphrases
100
Immersion Method Keyphrases
66
Metal Plasma Keyphrases
33
Plasma Immersion Io... Keyphrases
33
Mass Selection Keyphrases
33
Surface Film Keyphrases
33
Ion Implantation Keyphrases
33
Voltage Pulse Keyphrases
33
Metal Ions Keyphrases
33
Ion Beam Keyphrases
33
High-throughput Met... Keyphrases
33
Spot Mode Keyphrases
33
High Energy Implant... Keyphrases
33
Surface Deposition Keyphrases
33
Operating Mode Keyphrases
33
Broad Beam Keyphrases
33
Immersion Approach Keyphrases
33
Vacuum Arc Ion Sour... Keyphrases
33
Applied Dose Keyphrases

INIS

100
metals INIS
100
ion implantation INIS
100
doses INIS
100
plasma INIS
40
films INIS
40
surfaces INIS
40
energy INIS
40
deposition INIS
40
ions INIS
20
layers INIS
20
voltage INIS
20
synchronization INIS
20
applications INIS
20
deposits INIS
20
ion beams INIS
20
kev range INIS
20
pulses INIS
20
beams INIS
20
vacuum-arc ion sour... INIS

Physics

100
Ion Implantation Physics
100
Submerging Physics
100
Metal Ion Physics
100
Blood Plasma Physics
60
Metal Physics
20
Utilization Physics
20
Ion Physics
20
Electric Potential Physics
20
Pulse Physics
20
Vacuum Physics
20
Ratio Physics
20
Synchronism Physics
20
Ion Source Physics
20
Ion Beam Physics
20
Deposit Physics

Medicine and Dentistry

100
Drug Megadose Medicine and Dentistry
100
Metal Medicine and Dentistry
100
Metal Ion Medicine and Dentistry
33
Pulse Rate Medicine and Dentistry
Research OutputsResearch Output authored by Pure high dose metal ion implantation using the plasma immersion technique is tagged with the concept