Pure high dose metal ion implantation using the plasma immersion technique
- T. Zhang
- , B. Y. Tang
- , Z. M. Zeng
- , T. K. Kwok
- , P. K. Chu*
- , O. R. Monteiro
- , I. G. Brown
*Corresponding author for this work
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
6
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