TY - JOUR
T1 - Pull-in instability and free vibration of electrically actuated poly-SiGe graded micro-beams with a curved ground electrode
AU - Jia, X. L.
AU - Yang, J.
AU - Kitipornchai, S.
AU - Lim, C. W.
PY - 2012/5
Y1 - 2012/5
N2 - This paper investigates the pull-in instability and free vibration of functionally graded poly-SiGe micro-beams under combined electrostatic force, intermolecular force and axial residual stress, with an emphasis on the effects of ground electrode shape, position-dependent material composition, and geometrically nonlinear deformation of the micro-beam. The differential quadrature (DQ) method is employed to solve the nonlinear differential governing equations to obtain the pull-in voltage and vibration frequencies of the clamped poly-SiGe micro-beams. The present analysis is validated through direct comparisons with published experimental results and excellent agreement has been achieved. A parametric study is conducted to investigate the effects of material composition, ground electrode shape, axial residual stress and geometrical nonlinearity on the pull-in voltage and frequency characteristics. © 2011 Elsevier Inc.
AB - This paper investigates the pull-in instability and free vibration of functionally graded poly-SiGe micro-beams under combined electrostatic force, intermolecular force and axial residual stress, with an emphasis on the effects of ground electrode shape, position-dependent material composition, and geometrically nonlinear deformation of the micro-beam. The differential quadrature (DQ) method is employed to solve the nonlinear differential governing equations to obtain the pull-in voltage and vibration frequencies of the clamped poly-SiGe micro-beams. The present analysis is validated through direct comparisons with published experimental results and excellent agreement has been achieved. A parametric study is conducted to investigate the effects of material composition, ground electrode shape, axial residual stress and geometrical nonlinearity on the pull-in voltage and frequency characteristics. © 2011 Elsevier Inc.
KW - Casimir force
KW - Curved ground electrode
KW - Free vibration
KW - Functionally graded material
KW - Geometrical nonlinearity
KW - Pull-in instability
UR - http://www.scopus.com/inward/record.url?scp=84855827169&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84855827169&origin=recordpage
U2 - 10.1016/j.apm.2011.07.080
DO - 10.1016/j.apm.2011.07.080
M3 - RGC 21 - Publication in refereed journal
SN - 0307-904X
VL - 36
SP - 1875
EP - 1884
JO - Applied Mathematical Modelling
JF - Applied Mathematical Modelling
IS - 5
ER -