Optimized lift-off technique for deposition of high-quality Ti strip on LiNbO3 crystal

De-Long Zhang; W. H. Wong; E. Y B Pun

doi:10.1116/1.1637913

Author(s)

De-Long Zhang
W. H. Wong
E. Y B Pun

Related Research Unit(s)

Department of Electrical Engineering

Detail(s)

Original language	English
Pages (from-to)	283-285
Journal / Publication	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	22
Issue number	1
Publication status	Published - Jan 2004

Link(s)

DOI	DOI https://doi.org/10.1116/1.1637913 Final Published version
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Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-1642314267&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(ff045703-5794-4e43-930c-d0c2a884f6c5).html

Abstract

A lift-off technique for deposition of Ti strips onto the surface of both Z-and X-cut LiNbO₃ crystals was studied. Several pretreatments on the Ti-sputtered substrate were compared before carrying out the lift-off procedure to optimize the procedure. Preserving the Ti-sputtered substrate in a container at a temperature of 50-90 °C for a duration of several hours was found to be the best pretreatment. The pretreatment was found to strengthen the adhesion of the Ti metal onto the crystal surface to some extent and thereby allowed the obtaining of high quality Ti strips.

Citation Format(s)

[ RIS ] [ BibTeX ]

Optimized lift-off technique for deposition of high-quality Ti strip on LiNbO₃ crystal. / Zhang, De-Long; Wong, W. H.; Pun, E. Y B.
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 22, No. 1, 01.2004, p. 283-285.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Zhang, D-L, Wong, WH & Pun, EYB 2004, 'Optimized lift-off technique for deposition of high-quality Ti strip on LiNbO₃ crystal', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 22, no. 1, pp. 283-285. https://doi.org/10.1116/1.1637913

Zhang, D.-L., Wong, W. H., & Pun, E. Y. B. (2004). Optimized lift-off technique for deposition of high-quality Ti strip on LiNbO₃ crystal. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 22(1), 283-285. https://doi.org/10.1116/1.1637913

Zhang DL, Wong WH, Pun EYB. Optimized lift-off technique for deposition of high-quality Ti strip on LiNbO₃ crystal. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2004 Jan;22(1):283-285. doi: 10.1116/1.1637913

Zhang, De-Long ; Wong, W. H. ; Pun, E. Y B. / Optimized lift-off technique for deposition of high-quality Ti strip on LiNbO₃ crystal. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2004 ; Vol. 22, No. 1. pp. 283-285.