Direct growth of graphene film on germanium substrate

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review

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Author(s)

  • Gang Wang
  • Miao Zhang
  • Yun Zhu
  • Guqiao Ding
  • Da Jiang
  • Qinglei Guo
  • Su Liu
  • Xiaoming Xie
  • Zengfeng Di
  • Xi Wang

Detail(s)

Original languageEnglish
Article number2465
Journal / PublicationScientific Reports
Volume3
Online published19 Aug 2013
Publication statusPublished - 2013

Link(s)

Abstract

Graphene has been predicted to play a role in post-silicon electronics due to the extraordinary carrier mobility. Chemical vapor deposition of graphene on transition metals has been considered as a major step towards commercial realization of graphene. However, fabrication based on transition metals involves an inevitable transfer step which can be as complicated as the deposition of graphene itself. By ambient-pressure chemical vapor deposition, we demonstrate large-scale and uniform depositon of high-quality graphene directly on a Ge substrate which is wafer scale and has been considered to replace conventional Si for the next generation of high-performance metal-oxide- semiconductor field-effect transistors (MOSFETs). The immiscible Ge-C system under equilibrium conditions dictates graphene depositon on Ge via a self-limiting and surface-mediated process rather than a precipitation process as observed from other metals with high carbon solubility. Our technique is compatible with modern microelectronics technology thus allowing integration with high-volume production of complementary metal-oxide-semiconductors (CMOS).

Research Area(s)

Citation Format(s)

Direct growth of graphene film on germanium substrate. / Wang, Gang; Zhang, Miao; Zhu, Yun; Ding, Guqiao; Jiang, Da; Guo, Qinglei; Liu, Su; Xie, Xiaoming; Chu, Paul K.; Di, Zengfeng; Wang, Xi.

In: Scientific Reports, Vol. 3, 2465, 2013.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review