Optical Nanoscale Patterning Through Surface-Textured Polymer Films

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

17 Scopus Citations
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Author(s)

  • Ming Fang
  • Hao Lin
  • Ho-Yuen Cheung
  • Fei Xiu

Related Research Unit(s)

Detail(s)

Original languageEnglish
Pages (from-to)855-860
Journal / PublicationAdvanced Optical Materials
Volume2
Issue number9
Online published26 May 2014
Publication statusPublished - Sept 2014

Link(s)

DOI

DOI
Check@CityULib
Link to Scopus https://www.scopus.com/record/display.uri?eid=2-s2.0-84908204665&origin=recordpage
Permanent Link https://scholars.cityu.edu.hk/en/publications/publication(fd1cb873-498e-411c-acd4-96c0d21ecf0c).html

Abstract

Controllable nanoscale patterning of a photoresist is achieved via flood UV illumination with the assistance of conformably attached surface-textured polymer films. These polymer films can be reused numerous times, enabling the cost-effective and reliable fabrication of highly ordered nanopatterned arrays for widespread applications, from plasmonic sensors and multifunctional coatings to photovoltaics.

Research Area(s)

  • Nanoscale patterning, Photolithography, Photoresists, Polymer films, Soft masks, Surface plasmons

Fingerprint

Publication fingerprints text

100
Polymer Film Keyphrases
100
Surface Texture Keyphrases
100
Nanopatterning Keyphrases
100
films INIS
100
surfaces INIS
100
polymers INIS
100
nanostructures INIS
100
Polymer Films Material Science
33
Photoresist Keyphrases
33
UV Illumination Keyphrases
Full Fingerprint ›

Citation Format(s)

[ RIS ] [ BibTeX ]
Optical Nanoscale Patterning Through Surface-Textured Polymer Films. / Fang, Ming; Lin, Hao; Cheung, Ho-Yuen et al.
In: Advanced Optical Materials, Vol. 2, No. 9, 09.2014, p. 855-860.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review