The effects of tight capacitive coupling on phase noise performance : A Lamé-mode MEMS oscillator study

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

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Author(s)

  • Haoshen Zhu
  • Chieh-Hsu Chuang
  • Cheng-Syun Li
  • Ming-Huang Li
  • Sheng-Shian Li

Detail(s)

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages2304-2307
Publication statusPublished - 2013

Conference

Title17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS 2013)
PlaceSpain
CityBarcelona
Period16 - 20 June 2013

Abstract

In this work, we realize low-polarization-voltage (VP) capacitive MEMS oscillators implementing vacuum packaged 50nm-gap Lamé-mode silicon micromechanical resonators and investigate their phase noise (PN) performance. Two different oscillator configurations are studied; these are here referred to as differential-in-differential-out (DIDO) and single-in-differential-out (SIDO). Clear disparities in their respective PN profiles could be observed. The DIDO outperforms the SIDO with an improved close-to-carrier PN by more than 25dB. This 17.6MHz oscillator achieves a PN of 127dBc/Hz at 1kHz offset and 132dBc/Hz far-from-carrier PN performance, which is competitive with state-of-the-art capacitive MEMS oscillators but with lowest VP in this work. The measured PN is found to be dependent on V P for our oscillators, which is probably due to the nonlinear effects augmented by the tight electromechanical coupling. © 2013 IEEE.

Research Area(s)

  • Lamé mode, Micro-Electro-Mechanical Systems (MEMS), Oscillator, Phase Noise (PN), Resonator

Citation Format(s)

The effects of tight capacitive coupling on phase noise performance: A Lamé-mode MEMS oscillator study. / Zhu, Haoshen; Chuang, Chieh-Hsu; Li, Cheng-Syun et al.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 2304-2307 6627266.

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review