A Lorentz force magnetometer based on a piezoelectric-on-silicon radial-contour mode disk

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Detail(s)

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages830-833
ISBN (Electronic)978-1-5386-2732-7
ISBN (Print)9781538627310
Publication statusPublished - Jun 2017

Conference

Title19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
LocationKaohsiung Exhibition Center
PlaceTaiwan
CityKaohsiung
Period18 - 22 June 2017

Abstract

We report a unique MEMS magnetometer based on a disk shaped radial contour mode thin-film piezoelectric on silicon (TPoS) CMOS-compatible resonator. This is the first device of its kind that targets operation under atmospheric pressure conditions as opposed that existing Lorentz force MEMS magnetometers that depend on vacuum. We exploit the chosen vibration mode to enhance coupling to deliver a field sensitivity of 0.22 V/T while operating at a resonant frequency of 6.27 MHz, despite of a sub-optimal mechanical quality (Q) factor of 697 under ambient conditions in air.

Research Area(s)

  • Lorentz force, MEMS magnetometer, radial contour mode, thin-film piezoelectric on silicon (TPoS)

Citation Format(s)

A Lorentz force magnetometer based on a piezoelectric-on-silicon radial-contour mode disk. / Ghosh, Sagnik; Lee, Joshua E.-Y.

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. p. 830-833 7994177.

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review