Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

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Author(s)

Detail(s)

Original languageEnglish
Title of host publicationIFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (print)9781479949168
Publication statusPublished - 2014

Conference

Title2014 IEEE International Frequency Control Symposium, IFCS 2014
PlaceTaiwan
CityTaipei
Period19 - 22 May 2014

Abstract

This paper reports the first results that correlate nonlinear Duffing behavior and the temperature coefficient of frequency (TCf) in single-crystal-silicon (SCS) micromechanical resonators vibrating in lateral shear-dominant bulk modes, i.e. face shear (FS) and Lamé modes. Based on the anisotropic material property of SCS, we have derived a model to capture the nonlinear responses and the TCf for these devices in different orientations. The model predicts a clear orientation dependence of nonlinearity and temperature stability in SCS microresonators. These results suggest the possibility of reducing both nonlinearity and TCf by engineering the material properties (e.g. doping). © 2014 IEEE.

Research Area(s)

  • lateral shear mode, MEMS resonator, nonlinearity, temperature coefficient of frequency

Citation Format(s)

Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators. / Zhu, Haoshen; Lee, Joshua E.-Y.
IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings. IEEE Computer Society, 2014. 6859981.

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review