Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
Original language | English |
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Title of host publication | IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings |
Publisher | IEEE Computer Society |
ISBN (print) | 9781479949168 |
Publication status | Published - 2014 |
Conference
Title | 2014 IEEE International Frequency Control Symposium, IFCS 2014 |
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Place | Taiwan |
City | Taipei |
Period | 19 - 22 May 2014 |
Link(s)
Abstract
This paper reports the first results that correlate nonlinear Duffing behavior and the temperature coefficient of frequency (TCf) in single-crystal-silicon (SCS) micromechanical resonators vibrating in lateral shear-dominant bulk modes, i.e. face shear (FS) and Lamé modes. Based on the anisotropic material property of SCS, we have derived a model to capture the nonlinear responses and the TCf for these devices in different orientations. The model predicts a clear orientation dependence of nonlinearity and temperature stability in SCS microresonators. These results suggest the possibility of reducing both nonlinearity and TCf by engineering the material properties (e.g. doping). © 2014 IEEE.
Research Area(s)
- lateral shear mode, MEMS resonator, nonlinearity, temperature coefficient of frequency
Citation Format(s)
Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators. / Zhu, Haoshen; Lee, Joshua E.-Y.
IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings. IEEE Computer Society, 2014. 6859981.
IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings. IEEE Computer Society, 2014. 6859981.
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review