Nano-scratch behaviors of diamond like carbon films during loading-unloading processes

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

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Original languageEnglish
Pages (from-to)1247-1250
Journal / PublicationJinshu Xuebao/Acta Metallurgica Sinica
Issue number12
Publication statusPublished - 2001
Externally publishedYes


Nano-scratch behaviors of diamond-like carbon (DLC) films prepared on Si substrate by rf PECVD were evaluated using a Nano Indenter® XP system with attachment of lateral force measurement (LFM). It was found that elastic recovery, elastio-plastically deforming, cracking under loading and delaminating under unloading of the film, occur successively with the increase of scratching load. Though the DLC film has not been delaminated as continuous loading until cracking of film (cracking resistance LCL), the film was delaminated from the substrate after unloading, due to asynchronous recovery of the film and substrate. It is evident that nano-scratching test not only displays the cracking resistance charactering the cohesion strength of the film during loading, but also determines the critical load relating to adhesion of the film and the substrate during unloading.

Research Area(s)

  • Diamond-like carbon (DLC), Nano-scratch, Nanoindentation