2D phononic crystal acoustic bandgap for anchor loss reduction in a contour mode 142MHz piezoelectric AlN-on-silicon micromechanical resonator
Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
Original language | English |
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Publication status | Published - 22 Sept 2014 |
Conference
Title | 40th Int. Conf. on Micro and Nano Engineering (MNE 2014) |
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Place | Switzerland |
Period | 22 - 26 September 2014 |
Link(s)
Permanent Link | https://scholars.cityu.edu.hk/en/publications/publication(d6fd97ba-0c48-4360-a218-4b4bcaf355c5).html |
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Citation Format(s)
2D phononic crystal acoustic bandgap for anchor loss reduction in a contour mode 142MHz piezoelectric AlN-on-silicon micromechanical resonator. / ZHU, Haoshen; Di, XIAO; LEE, En-yuan Joshua.
2014. Paper presented at 40th Int. Conf. on Micro and Nano Engineering (MNE 2014), Switzerland.
2014. Paper presented at 40th Int. Conf. on Micro and Nano Engineering (MNE 2014), Switzerland.
Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review