2D phononic crystal acoustic bandgap for anchor loss reduction in a contour mode 142MHz piezoelectric AlN-on-silicon micromechanical resonator

Research output: Conference PapersRGC 32 - Refereed conference paper (without host publication)peer-review

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Original languageEnglish
Publication statusPublished - 22 Sept 2014

Conference

Title40th Int. Conf. on Micro and Nano Engineering (MNE 2014)
PlaceSwitzerland
Period22 - 26 September 2014

Citation Format(s)

2D phononic crystal acoustic bandgap for anchor loss reduction in a contour mode 142MHz piezoelectric AlN-on-silicon micromechanical resonator. / ZHU, Haoshen; Di, XIAO; LEE, En-yuan Joshua.
2014. Paper presented at 40th Int. Conf. on Micro and Nano Engineering (MNE 2014), Switzerland.

Research output: Conference PapersRGC 32 - Refereed conference paper (without host publication)peer-review