Low impedance very-high-frequency (VHF) band thermal piezoresistive silicon bulk acoustic resonator

Research output: Conference PapersRGC 32 - Refereed conference paper (without host publication)peer-review

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Detail(s)

Original languageEnglish
Publication statusPublished - 29 Jun 2014

Conference

Title7th Asia-Pacific Conf. on Transducers and Micro/Nano Technologies (APCOT 2014)
PlaceKorea, Republic of
Period29 June - 2 July 2014

Citation Format(s)

Low impedance very-high-frequency (VHF) band thermal piezoresistive silicon bulk acoustic resonator. / TU, Cheng; ZHU, Haoshen; RUFER, Libor et al.
2014. Paper presented at 7th Asia-Pacific Conf. on Transducers and Micro/Nano Technologies (APCOT 2014), Korea, Republic of.

Research output: Conference PapersRGC 32 - Refereed conference paper (without host publication)peer-review