A two-plane-parallel fixed electrodes micromachined tunable oscillator
Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 22_Publication in policy or professional journal
Author(s)
Detail(s)
| Original language | English |
|---|---|
| Pages (from-to) | 430-437 |
| Journal / Publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4408 |
| Publication status | Published - 2001 |
| Externally published | Yes |
Conference
| Title | Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 |
|---|---|
| Place | France |
| City | Cannes |
| Period | 25 - 27 April 2001 |
Link(s)
Abstract
High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significance factor in affecting the flat passband of the filter and will be further analyse in this paper.
Research Area(s)
- Bandpass filter, RF MEMS, Superheterodyne receiver and tunable oscillators
Citation Format(s)
A two-plane-parallel fixed electrodes micromachined tunable oscillator. / Loke, Y. C.; Liu, A. Q.; Liew, K. M. et al.
In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4408, 2001, p. 430-437.Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 22_Publication in policy or professional journal
