A two-plane-parallel fixed electrodes micromachined tunable oscillator

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

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Original languageEnglish
Pages (from-to)430-437
Journal / PublicationProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2001
Externally publishedYes


TitleDesign, Test, Integration, and Packaging of MEMS/MOEMS 2001
Period25 - 27 April 2001


High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significance factor in affecting the flat passband of the filter and will be further analyse in this paper.

Research Area(s)

  • Bandpass filter, RF MEMS, Superheterodyne receiver and tunable oscillators