Enhanced linear electrical characterization of a silicon double-ended tuning fork resonator by piezoresistive detection at the fundamental excitation frequency
Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
Original language | English |
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Publication status | Published - 22 Sept 2014 |
Conference
Title | 40th Int. Conf. on Micro and Nano Engineering (MNE 2014) |
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Place | Switzerland |
Period | 22 - 26 September 2014 |
Link(s)
Permanent Link | https://scholars.cityu.edu.hk/en/publications/publication(c77abd49-7bcf-4e22-bd47-5bb79baf3105).html |
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Citation Format(s)
Enhanced linear electrical characterization of a silicon double-ended tuning fork resonator by piezoresistive detection at the fundamental excitation frequency. / ZHANG, Weiguan; ZHU, Haoshen; LEE, En-yuan Joshua.
2014. Paper presented at 40th Int. Conf. on Micro and Nano Engineering (MNE 2014), Switzerland.
2014. Paper presented at 40th Int. Conf. on Micro and Nano Engineering (MNE 2014), Switzerland.
Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review