Lorentz Force Magnetic Sensor based on a Thin-Film Piezoelectric-on-Silicon Laterally Vibrating Micromechanical Resonator

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Detail(s)

Original languageEnglish
Title of host publicationProcedia Engineering
PublisherElsevier Ltd
Pages654-657
Volume168
Publication statusPublished - Sep 2016

Publication series

Name
ISSN (Print)1877-7058

Conference

Title30th Eurosensors Conference, Eurosensors 2016
PlaceHungary
CityBudapest
Period4 - 7 September 2016

Link(s)

Abstract

We present a unique MEMS magnetometer based on a laterally-vibrating Thin-film Piezoelectric-on-Silicon (TPoS) resonator. This is the first time that the piezoelectric effect has been explored for the detection of magnetic fields among CMOS-compatible resonant devices. Strong electromechanical coupling provided by the Aluminium Nitride (AlN) layer, enhances sensitivity to allow operation in air as opposed to vacuum. A Lorentz force in the presence of a magnetic field excites the in-plane vibration mode. No amplifier circuit has been used at the output of the magnetometer. Our proof-of-concept device has been operated at a resonant frequency of 33.27 MHz, and shows a measured sensitivity of 0.42 μA/T despite a sub-optimal quality factor (Q) of 432 in air.

Research Area(s)

  • lateral vibration mode, microelectromechanical systems (MEMS), micromachined resonant magnetic field sensor, Thin-Film Piezoelectric-on-Silicon (TPoS)

Citation Format(s)

Lorentz Force Magnetic Sensor based on a Thin-Film Piezoelectric-on-Silicon Laterally Vibrating Micromechanical Resonator. / Ghosh, S.; Lee, J. E Y.

Procedia Engineering. Vol. 168 Elsevier Ltd, 2016. p. 654-657.

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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