Square-extensional mode piezoelectric-on-silicon resonator for physical measurements of liquids

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Detail(s)

Original languageEnglish
Title of host publication2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings
PublisherIEEE
Pages427-430
ISBN (Print)9781509020911
Publication statusPublished - 16 Aug 2016

Publication series

NameIEEE International Frequency Control Symposium
PublisherIEEE
ISSN (Print)1075-6787

Conference

Title70th IEEE International Frequency Control Symposium, IFCS 2016
PlaceUnited States
CityNew Orleans
Period9 - 12 May 2016

Abstract

In this paper, we report a square-extensional (SE) mode MEMS resonator fabricated in piezoelectric thin film Aluminium Nitride (AlN) on Silicon technology. We demonstrate that the resonator can be used to perform physical measurements of various known organic liquids in addition to deionized water. It is well known that operating a MEMS resonator in liquid inevitably introduces viscous damping. The AlN provides strong electromechanical coupling using piezoelectric transduction, which in the SE mode results in a low insertion loss. We are able to achieve higher quality factors (Qs) using this vibration mode compared to out-of-plane modes. We have found that Qs can vary widely between values of 33 to 181 for different liquids used. Furthermore, we have found that the level of feedthrough for different liquids are linearly correlated with the dielectric properties of the different liquid samples measured. These promising results are beneficial for the detection of chemicals.

Research Area(s)

  • Micromechanical, MEMS resonator, piezoelectric devices, quality factor, damping

Citation Format(s)

Square-extensional mode piezoelectric-on-silicon resonator for physical measurements of liquids. / Ali, Abid; Lee, Joshua E.-Y.

2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings. IEEE, 2016. p. 427-430 7546823 (IEEE International Frequency Control Symposium).

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review