High-Q lithium niobate microring resonators using lift-off metallic masks [Invited]

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

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Original languageEnglish
Article number060010
Journal / PublicationChinese Optics Letters
Issue number6
Online published8 May 2021
Publication statusPublished - Jun 2021


High-Q lithium niobate (LN) optical micro-resonators are an excellent platform for future applications in optical communications, nonlinear optics, and quantum optics. To date, high-Q factors are typically achieved in LN using either dielectric masks or femtosecond laser ablation, while the more standard and commonly available lift-off metallic masks are often believed to lead to rough sidewalls and lowered Q factors. Here, we show that LN microring resonators with strong light confinement and intrinsic Q factors over 1 million can be fabricated using optimized lift-off metallic masks and dry etching processes, corresponding to a waveguide propagation loss of ∼0.3 dB/cm. The entire process is fully compatible with wafer-scale production and could be transferred to other photonic materials.

Research Area(s)

  • Lithium niobate, Microstructure fabrication, Optical resonators