Fabrication and cutting performance of CrA1N/CrA1 multilayer coatings deposited by continuous high-power magnetron sputtering
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
Original language | English |
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Pages (from-to) | 14528-14536 |
Number of pages | 9 |
Journal / Publication | Ceramics International |
Volume | 48 |
Issue number | 10 |
Online published | 4 Feb 2022 |
Publication status | Published - 15 May 2022 |
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Abstract
Continuous high-power magnetron sputtering (C-HPMS) is one of the desirable techniques to fabricate coatings with high hardness and a smooth surface to meet the demand by micro-millings for processing/cutting of printed circuit boards (PCBs). However, catastrophic failure can occur on the coatings because of the high residual stress in contact with hard glass fibers in PCBs at a high cutting speed. In this work, CrA1N/CrA1 multilayer coatings consisting of thin CrA1 interlayers are fabricated and characterized. The thin CrA1 layers reduce the residual stress significantly from −6.7 GPa to −1.5 GPa, while the hardness of 35 GPa is preserved. Furthermore, the adhesion strength and wear resistance are improved appreciably by addition of the interlayers. The PCB cutting tests reveal that the CrA1 layers mitigate sudden failure of the coatings and improve the cutting stability and service life by near two times.
Research Area(s)
- C-HPMS, Micro-millings, Multilayers, PCB cutting, Residual stress
Citation Format(s)
Fabrication and cutting performance of CrA1N/CrA1 multilayer coatings deposited by continuous high-power magnetron sputtering. / Liu, Liangliang; Ruan, Qingdong; Wu, Zhongzhen et al.
In: Ceramics International, Vol. 48, No. 10, 15.05.2022, p. 14528-14536.
In: Ceramics International, Vol. 48, No. 10, 15.05.2022, p. 14528-14536.
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review