Dual-MWCNT probe thermal sensor assembly and evaluation based on nanorobotic manipulation inside a field-emission-scanning electron microscope

Zhan Yang; Pengbo Wang; Yajing Shen; Tao Chen; Liguo Chen; Qiang Huang; Lining Sun; Toshio Fukuda

doi:10.5772/59932

Author(s)

Zhan Yang
Pengbo Wang
Tao Chen
Liguo Chen
Qiang Huang
Lining Sun
Toshio Fukuda

Detail(s)

Original language	English
Journal / Publication	International Journal of Advanced Robotic Systems
Volume	12
Publication status	Published - 18 Mar 2015

Link(s)

DOI	DOI https://doi.org/10.5772/59932 Final Published version
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Attachment(s)	Documents 5942442.pdf Final Published version, 840 KB, PDF Publisher's Copyright Statement This full text is made available under CC-BY 3.0. https://creativecommons.org/licenses/by/3.0/
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-84930225426&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(b6a7c07f-9937-42b0-95d2-60b7884e9545).html

Abstract

We report a thermal sensor composed of two multiwalled carbon nano-tubes (MWCNTs) inside a field-emission-scanning electron microscope. The sensor was assembled using a nanorobotic manipulation system, which was used to construct a probe tip in order to detect the local environment of a single cell. An atomic force microscopy (AFM) cantilever was used as a substrate; the cantilever was composed of Si₃N₄ and both sides were covered with a gold layer. MWCNTs were individually assembled on both sides of the AFM cantilever by employing nanorobotic manipulation. Another AFM cantilever was subsequently used as an end effector to manipulate the MWCNTs to touch each other. Electron-beam-induced deposition (EBID) was then used to bond the two MWCNTs. The MWCNT probe thermal sensor was evaluated inside a thermostated container in the temperature range from 25°C to 60°C. The experimental results show the positive characteristics of the temperature coefficient of resistance (TCR).