1 THz Micromachined Waveguide Band-Pass Filter

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

11 Scopus Citations
View graph of relations

Author(s)

  • Shuang Liu
  • Jiang Hu
  • Yong Zhang
  • Zhongwan Zheng
  • Yupeng Liu
  • And 2 others
  • Ruimin Xu
  • Quan Xue

Related Research Unit(s)

Detail(s)

Original languageEnglish
Pages (from-to)435-447
Journal / PublicationJournal of Infrared, Millimeter, and Terahertz Waves
Volume37
Issue number5
Online published1 Dec 2015
Publication statusPublished - May 2016

Abstract

This paper presents a waveguide band-pass filter operating at the 0.75∼1.1 THz frequency band. The metal conductivity, the surface impedance, and the skin depth are investigated in the terahertz (THz) frequency band for more accurate designs, especially at the 1 THz and higher frequencies. Because the influence of the fabrication tolerance on the component performance cannot be negligible while the frequency increases, it is a necessary to adopt the simple structure with less resonant cavities for obtaining the given performance. Therefore, the filter in this paper is designed based on the TE301/TE102 dual-mode rectangular waveguide resonant cavities, which has fewer cavities and better rejection of the stop-band. The proposed filter is fabricated using the deep reactive ion etching (DRIE) micromachining technique. Measured results are in good agreement with simulations, which verifies the accuracy of the analysis above, and the design process is valuable to realize high-performance passive components while the frequency is up to 1 THz or higher frequencies.

Research Area(s)

  • 1 THz, Metal conductivity, Dual-mode resonant cavities, Band-pass filter, DRIE

Citation Format(s)

1 THz Micromachined Waveguide Band-Pass Filter. / Liu, Shuang; Hu, Jiang; Zhang, Yong; Zheng, Zhongwan; Liu, Yupeng; Xu, Ruimin; Xue, Quan.

In: Journal of Infrared, Millimeter, and Terahertz Waves, Vol. 37, No. 5, 05.2016, p. 435-447.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review