Planar ring-shaped phononic crystal anchoring boundaries for enhancing the quality factor of Lamb mode resonators

L. Binci; C. Tu; H. Zhu; J. E.-Y. Lee

doi:10.1063/1.4967794

Author(s)

L. Binci
C. Tu
H. Zhu
J. E.-Y. Lee

Related Research Unit(s)

Detail(s)

Original language	English
Article number	203501
Journal / Publication	Applied Physics Letters
Volume	109
Issue number	20
Publication status	Published - 14 Nov 2016

Link(s)

DOI	DOI https://doi.org/10.1063/1.4967794 Final Published version
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Attachment(s)	Documents 11831778.pdf Final Published version, 2.4 MB, PDF Publisher's Copyright Statement COPYRIGHT TERMS OF DEPOSITED FINAL PUBLISHED VERSION FILE: This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in L. Binci, C. Tu, H. Zhu, and J. E.-Y. Lee, "Planar ring-shaped phononic crystal anchoring boundaries for enhancing the quality factor of Lamb mode resonators", Appl. Phys. Lett. 109, 203501 (2016) and may be found at https://doi.org/10.1063/1.4967794.
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-84996489670&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(aae80c96-198c-4b93-b73e-cbd2db543ee4).html

Abstract

We report the use of planar ring-shaped phononic crystals (PnCs) as anchor boundaries of very-high-frequency band piezoelectric-on-silicon Lamb mode resonators for the purpose of enhancing their quality factor (Q). Here, we exploit the acoustic bandgap associated with the PnC anchoring boundaries to reduce acoustic energy leakage out of the micromechanical resonator. The proposed approach provides greater mechanical robustness (by merit of interlocking the cells in a matrix) and the possibility of electrical routing through the PnC cells. We experimentally show enhancements in Q by a factor of three using the proposed approach of hybridizing planar ring-shaped PnCs with micromechanical resonators. The effect of these PnCs on resonator Q is further corroborated by their effects in suppressing transmission when incorporated into a delay line.