Lorentz Force Magnetic Sensors based on Piezoelectric Aluminum Nitride on Silicon Micromechanical Resonators

Research output: Conference Papers (RGC: 31A, 31B, 32, 33)31A_Invited conference paper (refereed items)Yespeer-review

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Detail(s)

Original languageEnglish
Pages288-291
Publication statusPublished - Apr 2018

Conference

Title13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018)
LocationGrand Hyatt Singapore
PlaceSingapore
Period22 - 26 April 2018

Abstract

This paper describes recent results on realizing of a new class of magnetic sensors based on piezoelectric Aluminum Nitride on Silicon (AlN-on-Si) resonators that are actuated by a magnetic field-induced Lorentz force. The proposed approach exploits the efficient electromechanical coupling that is afforded by piezoelectric transduction to enhance the sensitivity of the electrical readout. This enhancement in the coupling allows for the device to operate outside of vacuum. We present 4 different device concepts herein with the aim to illustrate the possibility of implementing three-axis detection on a single chip based on the proposed approach.

Citation Format(s)

Lorentz Force Magnetic Sensors based on Piezoelectric Aluminum Nitride on Silicon Micromechanical Resonators. / Ghosh, Sagnik; Lee, Joshua E.-Y.

2018. 288-291 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018), Singapore.

Research output: Conference Papers (RGC: 31A, 31B, 32, 33)31A_Invited conference paper (refereed items)Yespeer-review