Lorentz Force Magnetic Sensors based on Piezoelectric Aluminum Nitride on Silicon Micromechanical Resonators
Research output: Conference Papers (RGC: 31A, 31B, 32, 33) › 31A_Invited conference paper (refereed items) › Yes › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
| Original language | English |
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| Pages | 288-291 |
| Publication status | Published - Apr 2018 |
Conference
| Title | 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018) |
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| Location | Grand Hyatt Singapore |
| Place | Singapore |
| Period | 22 - 26 April 2018 |
Link(s)
Abstract
This paper describes recent results on realizing of a new class of magnetic sensors based on piezoelectric Aluminum Nitride on Silicon (AlN-on-Si) resonators that are actuated by a magnetic field-induced Lorentz force. The proposed approach exploits the efficient electromechanical coupling that is afforded by piezoelectric transduction to enhance the sensitivity of the electrical readout. This enhancement in the coupling allows for the device to operate outside of vacuum. We present 4 different device concepts herein with the aim to illustrate the possibility of implementing three-axis detection on a single chip based on the proposed approach.
Citation Format(s)
Lorentz Force Magnetic Sensors based on Piezoelectric Aluminum Nitride on Silicon Micromechanical Resonators. / Ghosh, Sagnik; Lee, Joshua E.-Y.
2018. 288-291 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018), Singapore.Research output: Conference Papers (RGC: 31A, 31B, 32, 33) › 31A_Invited conference paper (refereed items) › Yes › peer-review
