Microstructure, mechanical properties, and oxidation resistance of nanocomposite Ti-Si-N coatings

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

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  • C. H. Zhang
  • X. C. Lu
  • H. Wang
  • J. B. Luo


Original languageEnglish
Pages (from-to)6141-6153
Journal / PublicationApplied Surface Science
Issue number18
Publication statusPublished - 15 Jul 2006


Ti-Si-N coatings with different silicon contents (0-12 at.%) were deposited onto Si(1 0 0) wafer, AISI M42 high speed steel, and stainless steel plate, respectively. These coatings were characterized and analyzed by using a variety of analytical techniques, such as XRD, AES, SEM, XPS, nanoindentation measurements, Rockwell C-type indentation tester, and scratch tester. The results revealed that the hardness was strongly correlated to the amount of silicon addition into a growing TiN film. The maximum hardness of 47.1 GPa was achieved as the Si content was 8.6 at.%. In the mechanical and oxidation resistance measurements, the Ti-Si-N coatings showed three distinct behaviors. (i) The coatings with Si contents of no more than 8.6 at.% performed good adhesion strength quality onto the HSS substrates. (ii) The fracture toughness of the coatings decreased with the increase in Si content. (iii) The Ti-Si-N coating with 8.6 at.% Si showed the excellent oxidation resistance behavior. The cutting performance under using coolant conditions was also evaluated by a conventional drilling machine. The drills with Ti-Si-N coatings performed much better than the drills with TiN coating and the uncoated drills. © 2005 Elsevier B.V. All rights reserved.

Research Area(s)

  • Cutting performance, Mechanical properties, Oxidation resistance, Ti-Si-N coating