水分子在 Si(100) 面上吸附位的确定
Determination of adsorption site of H2O on Si(100) surface
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Author(s)
Detail(s)
Original language | Chinese (Simplified) |
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Pages (from-to) | 820-825 |
Journal / Publication | 半导体学报 |
Volume | 16 |
Issue number | 11 |
Publication status | Published - Nov 1995 |
Externally published | Yes |
Link(s)
Abstract
本文用 Si66H50 原子集团模拟 Si(100) 表面,采用 CNDO 分子轨道理论方法计算了 H2O 在其上吸附的势能面.确定出 H2O 在 Si(100) 表面的最佳吸附位为洞位.在桥位 Ⅰ、桥位 Ⅱ 和顶位上吸附时势能依次升高.
Potential contour map of cluster Si66H50-H2O simulating H2O adsorbed on Si(100) has been calculated by using semiempirical CNDO method. The results suggest that the best adsorption site is cave position, and the adsorption probability of bridge I position, bridge II position and top position reduces in turn.