Eleventh Order Lamb Wave Mode Biconvex Piezoelectric Lorentz Force Magnetometer for Scaling Up Responsivity and Bandwidth
Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with ISBN/ISSN) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
| Original language | English |
|---|---|
| Title of host publication | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII |
| Publisher | IEEE |
| Pages | 146-149 |
| ISBN (Electronic) | 978-1-5386-8104-6 |
| Publication status | Published - Jun 2019 |
Publication series
| Name | 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII |
|---|
Conference
| Title | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) |
|---|---|
| Location | Estrel Congress Center |
| Place | Germany |
| City | Berlin |
| Period | 23 - 27 June 2019 |
Link(s)
Abstract
We report the novel use of a higher harmonic Lamb wave modes to realize a piezoelectric readout Lorentz force magnetometer (LFM). The proposed design aims to significantly enhance the pre-amplified sensitivity per unit of excitation current (referred to as the responsivity here) relative to the fundamental mode in the same resonator. By exploiting an 11th harmonic Lamb mode biconvex resonator, we experimentally demonstrate over 5 times increase in responsivity over another device based on the fundamental mode. Compared to state-of-art capacitive LFMs encapsulated in vacuum for high quality factor (Q), the 11th order Lamb wave LFM reported herein boasts a ten-fold boost to responsivity (26.8ppm/mT) in ambient (i.e. atmospheric) pressure.
Research Area(s)
- Aluminum Nitride on Silicon resonators., Lamb wave mode resonators, Lorentz force, MEMS magnetic sensors, piezoelectric devices
Citation Format(s)
Eleventh Order Lamb Wave Mode Biconvex Piezoelectric Lorentz Force Magnetometer for Scaling Up Responsivity and Bandwidth. / Ghosh, Sagnik; Lee, Joshua E.-Y.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE, 2019. p. 146-149 8808236 (20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII).Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with ISBN/ISSN) › peer-review
