Eleventh Order Lamb Wave Mode Biconvex Piezoelectric Lorentz Force Magnetometer for Scaling Up Responsivity and Bandwidth

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

2 Scopus Citations
View graph of relations

Detail(s)

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherIEEE
Pages146-149
ISBN (Electronic)978-1-5386-8104-6
Publication statusPublished - Jun 2019

Publication series

Name20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII

Conference

Title2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
LocationEstrel Congress Center
PlaceGermany
CityBerlin
Period23 - 27 June 2019

Abstract

We report the novel use of a higher harmonic Lamb wave modes to realize a piezoelectric readout Lorentz force magnetometer (LFM). The proposed design aims to significantly enhance the pre-amplified sensitivity per unit of excitation current (referred to as the responsivity here) relative to the fundamental mode in the same resonator. By exploiting an 11th harmonic Lamb mode biconvex resonator, we experimentally demonstrate over 5 times increase in responsivity over another device based on the fundamental mode. Compared to state-of-art capacitive LFMs encapsulated in vacuum for high quality factor (Q), the 11th order Lamb wave LFM reported herein boasts a ten-fold boost to responsivity (26.8ppm/mT) in ambient (i.e. atmospheric) pressure.

Research Area(s)

  • Aluminum Nitride on Silicon resonators., Lamb wave mode resonators, Lorentz force, MEMS magnetic sensors, piezoelectric devices

Citation Format(s)

Eleventh Order Lamb Wave Mode Biconvex Piezoelectric Lorentz Force Magnetometer for Scaling Up Responsivity and Bandwidth. / Ghosh, Sagnik; Lee, Joshua E.-Y.

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE, 2019. p. 146-149 8808236 (20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII).

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review