Enhanced piezoresistive sensing via synchronized oscillations in a mechanically coupled disk array
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
Original language | English |
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Title of host publication | 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 |
Pages | 1384-1387 |
Publication status | Published - 2013 |
Conference
Title | 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS 2013) |
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Place | Spain |
City | Barcelona |
Period | 16 - 20 June 2013 |
Link(s)
Abstract
This paper presents the mechanical coupling of SOI disk resonators for synchronized oscillation of a resonator array. The synchronized array of disk resonators has the added enhancement of employing piezoresistive readout to boost electromechanical transconduction. Compared to a single disk resonator using capacitive readout, an array of two disks employing piezoresistive sensing provides a 18.2dB reduction in the insertion loss. In terms of quality factor (Q), rather than suffer a reduction as a result of the coupling, the coupled disk array even showed a doubling of Q relative to that of a single disk resonator (184,000 as compared to 95,000). © 2013 IEEE.
Research Area(s)
- Array, Disk Resonator, Mechanical Coupling, Piezoresistive Sensing, Quality Factor, Transconductance
Citation Format(s)
Enhanced piezoresistive sensing via synchronized oscillations in a mechanically coupled disk array. / Iqbal, A.; Zhang, W.; Lee, J. E Y.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 1384-1387 6627036.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 1384-1387 6627036.
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review