Enhanced piezoresistive sensing via synchronized oscillations in a mechanically coupled disk array

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

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Author(s)

Detail(s)

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages1384-1387
Publication statusPublished - 2013

Conference

Title17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS 2013)
PlaceSpain
CityBarcelona
Period16 - 20 June 2013

Abstract

This paper presents the mechanical coupling of SOI disk resonators for synchronized oscillation of a resonator array. The synchronized array of disk resonators has the added enhancement of employing piezoresistive readout to boost electromechanical transconduction. Compared to a single disk resonator using capacitive readout, an array of two disks employing piezoresistive sensing provides a 18.2dB reduction in the insertion loss. In terms of quality factor (Q), rather than suffer a reduction as a result of the coupling, the coupled disk array even showed a doubling of Q relative to that of a single disk resonator (184,000 as compared to 95,000). © 2013 IEEE.

Research Area(s)

  • Array, Disk Resonator, Mechanical Coupling, Piezoresistive Sensing, Quality Factor, Transconductance

Citation Format(s)

Enhanced piezoresistive sensing via synchronized oscillations in a mechanically coupled disk array. / Iqbal, A.; Zhang, W.; Lee, J. E Y.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 1384-1387 6627036.

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review