On-chip Feedthrough Cancellation Technique for Enhanced Electrical Characterization of a Piezoelectric MEMS Resonator in Water

Abid Ali; Joshua E.-Y. Lee

doi:10.1016/j.proeng.2016.11.463

On-chip Feedthrough Cancellation Technique for Enhanced Electrical Characterization of a Piezoelectric MEMS Resonator in Water

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

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3 Scopus Citations

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Detail(s)

Original language	English
Title of host publication	Procedia Engineering
Publisher	ELSEVIER
Pages	1573-1576
Volume	168
ISBN (print)	18777058
Publication status	Published - Oct 2016

Publication series

Name
ISSN (Print)	1877-7058

Conference

Title	30th Eurosensors Conference, Eurosensors 2016
Place	Hungary
City	Budapest
Period	4 - 7 September 2016

Link(s)

DOI	DOI https://doi.org/10.1016/j.proeng.2016.11.463 Final Published version
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Attachment(s)	Documents 14354171.pdf Final Published version, 562 KB, PDF Publisher's Copyright Statement This full text is made available under CC-BY-NC-ND 4.0. https://creativecommons.org/licenses/by-nc-nd/4.0/
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-85009968804&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(9b5a4b66-1a84-43d3-84e3-28344af273a5).html

Abstract

In this work, we report a unique on-chip approach of cancelling feedthrough applied to a Thin-film Piezoelectric-on-Silicon (TPoS) MEMS resonator fully immersed in deionized (DI) water to enhance the signal-to-background ratio (SBR) in the context of full electrical characterization. We experimentally validate the proposed technique by demonstrating an SBR as high as 25dB despite a reasonably low quality factor (Q) of 162 and high dielectric constant of water from a reference SBR of 3.45dB. The proposed technique employs a pair of differential inputs where one input actuates the device while the other input cancels feedthrough and targets package-level parasitic elements associated with measuring in water. The resulting net feedthrough capacitance is reduced from 185fF to just 2.04fF in DI water. These results are based on a simple practical setup where the fabricated device is interfaced with a customized printed circuit board (PCB) by wire-bonds.