Area-Selective Atomic Layer Deposition : Conformal Coating, Subnanometer Thickness Control and Smart Positioning

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Original languageEnglish
Pages (from-to)8651-8654
Journal / PublicationACS Nano
Volume9
Publication statusPublished - 2015