AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
Original language | English |
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Title of host publication | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
Publisher | Institute of Electrical and Electronics Engineers, Inc. |
Pages | 797-800 |
Edition | Jan 2015 |
ISBN (electronic) | 978-1-4799-7955-4 |
ISBN (print) | 978-1-4799-7954-7, 978-1-4799-7956-1 |
Publication status | Published - Jan 2015 |
Conference
Title | 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015) |
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Location | Estoril Congress Center |
Place | Portugal |
City | Estoril |
Period | 18 - 22 January 2015 |
Link(s)
Abstract
We report an approach to suppress anchor loss in thin-film piezoelectric-on-silicon (TPoS) micromechanical (MEMS) resonators by patterning 2D phononic crystals (PnCs) externally on the anchors. The PnCs serve as a frequency-selective reflector for outgoing acoustic waves through the tethers of the TPoS resonator. According to our experimental results, combining the PnCs with the conventional TPoS resonator significantly enhances the quality factor (Q) and correspondingly lowers the insertion loss (IL). The measured improvement is reproducible over multiple samples and consistent with the simulations by tuning the PnC bandgaps, suggesting significant reduction of acoustic leakage to the substrate by adopting the PnCs.
Citation Format(s)
AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors. / Zhu, Haoshen; Lee, Joshua E.-Y.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Jan 2015. ed. Institute of Electrical and Electronics Engineers, Inc., 2015. p. 797-800.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Jan 2015. ed. Institute of Electrical and Electronics Engineers, Inc., 2015. p. 797-800.
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review