AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Author(s)

Detail(s)

Original languageEnglish
Title of host publication2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherIEEE
Pages797-800
EditionJan 2015
ISBN (Electronic)978-1-4799-7955-4
ISBN (Print)978-1-4799-7954-7, 978-1-4799-7956-1
Publication statusPublished - Jan 2015

Conference

Title28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)
LocationEstoril Congress Center
PlacePortugal
CityEstoril
Period18 - 22 January 2015

Abstract

We report an approach to suppress anchor loss in thin-film piezoelectric-on-silicon (TPoS) micromechanical (MEMS) resonators by patterning 2D phononic crystals (PnCs) externally on the anchors. The PnCs serve as a frequency-selective reflector for outgoing acoustic waves through the tethers of the TPoS resonator. According to our experimental results, combining the PnCs with the conventional TPoS resonator significantly enhances the quality factor (Q) and correspondingly lowers the insertion loss (IL). The measured improvement is reproducible over multiple samples and consistent with the simulations by tuning the PnC bandgaps, suggesting significant reduction of acoustic leakage to the substrate by adopting the PnCs.

Citation Format(s)

AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors. / Zhu, Haoshen; Lee, Joshua E.-Y.

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Jan 2015. ed. IEEE, 2015. p. 797-800.

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review