AlN-on-Si Square Diaphragm Piezoelectric Micromachined Ultrasonic Transducer with Extended Range of Detection

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Author(s)

Detail(s)

Original languageEnglish
Title of host publicationProceedings - EUROSENSORS 2018
PublisherMDPI AG
Number of pages4
Volume2
ISBN (Print)2504-3900
Publication statusPublished - Sep 2018

Conference

Title32nd Eurosensors Conference (EUROSENSORS 2018)
PlaceAustria
CityGraz
Period9 - 12 September 2018

Link(s)

Abstract

We present aluminum nitride (AlN) on silicon (Si) CMOS-compatible piezoelectric micromachined ultrasonic transducers (pMUTs) with an extended detection range of up to 140 cm for touchless sensing applications. The reported performance surpasses the current state-of-art for AlN-based pMUTs in terms of the maximum range of detection using just a pair of pMUTs (as opposed to an array of pMUTs). The extended range of detection has been realized by using a larger diaphragm allowed by fabricating a thicker diaphragm than most other pMUTs reported to date. Using a pair of pMUTs, we experimentally demonstrate the capability of range-finding by correlating the time-of-flight (TOF) between the transmit (TX) and receive (RX) pulse. The results were obtained using an experimental setup where the MEMS chip was interconnected with a customized printed circuit board (PCB) using Al wire bonds.

Research Area(s)

  • aluminum nitride (AlN), piezoelectric micromachined ultrasonic transducer (pMUT), touchless sensing

Citation Format(s)

AlN-on-Si Square Diaphragm Piezoelectric Micromachined Ultrasonic Transducer with Extended Range of Detection. / Alasatri, Suresh; Rufer, Libor; Lee, Joshua.

Proceedings - EUROSENSORS 2018. Vol. 2 MDPI AG, 2018. 913.

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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