MASS SENSITIVITY MEASUREMENTS OF A NOVEL HIGH Q-FACTOR DISK RESONATOR FOR LIQUID-PHASE SENSING APPLICATIONS

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

2 Scopus Citations
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Detail(s)

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators & Microsystems and Eurosensors XXXIII (TRANSDUCERS 2019 & EUROSENSORS XXXIII)
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1886-1889
ISBN (Electronic)9781538681046, 9781728120072
ISBN (Print)9781538681053
Publication statusPublished - Jun 2019

Publication series

NameInternational Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors, TRANSDUCERS and EUROSENSORS
ISSN (Print)2167-0013
ISSN (Electronic)2167-0021

Conference

Title2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
LocationEstrel Congress Center
PlaceGermany
CityBerlin
Period23 - 27 June 2019

Abstract

We present, for the first time, mass sensitivity measurements of a novel resonant mode based on a disk resonator that delivers the one of the highest Q-factors among resonators tested in liquid (Q of 362). The mode of interest is referred to as the Button-like (BL) mode as its associated lateral strain profile resembles a shirt button. In the context of mass sensing, the high Q-factor of the BL mode enhances mass resolution. Its motional resistance (Rm) in water is 5.3kΩ, which greatly eases the difficulty in designing control circuits. In this paper, we measured the mass sensitivity of the device by depositing chrome (Cr) on the bottom surface of the device through a back cavity. The resonator has a measured mass sensitivity of 17.2ppm/ng for uniformly deposited mass on the resonator’s surface.

Research Area(s)

  • button-like, liquid phase, mass sensor, Micromechanical resonators, piezoelectric

Citation Format(s)

MASS SENSITIVITY MEASUREMENTS OF A NOVEL HIGH Q-FACTOR DISK RESONATOR FOR LIQUID-PHASE SENSING APPLICATIONS. / Begum, Habiba; Ali, Abid; Lee, Joshua En-Yuan.

2019 20th International Conference on Solid-State Sensors, Actuators & Microsystems and Eurosensors XXXIII (TRANSDUCERS 2019 & EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc., 2019. p. 1886-1889 M3P.104 (International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors, TRANSDUCERS and EUROSENSORS).

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review