Self-Sustaining Square-Extensional Mode Resonator Oscillator for Mass Sensing in Liquid

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Detail(s)

Original languageEnglish
Title of host publicationProceedings - EUROSENSORS 2018
PublisherMDPI AG
Number of pages4
Volume2
ISBN (Print)2504-3900
Publication statusPublished - Sep 2018

Conference

Title32nd Eurosensors Conference (EUROSENSORS 2018)
PlaceAustria
CityGraz
Period9 - 12 September 2018

Link(s)

Abstract

We present a 5.41 MHz square-extensional (SE) mode resonator in closed-loop oscillation for resonant mass sensing in the liquid phase. The resonator has been fabricated in piezoelectric thin film aluminum nitride (AlN) on silicon (Si). The strain profile of the SE mode allows for higher electromechanical coupling efficiency using piezoelectric transduction to lower the motional resistance (Rm) given the expected low quality factors (Q) in liquid (136 compared to 942 in air). By locking the device into self-sustained oscillation, the minimum detectable frequency shift is reduced from 3680 ppm (open-loop in water) to 8.76 ppm (closed-loop in air).

Research Area(s)

  • MEMS resonator, MEMS oscillator, thin-film piezoelectric-on-silicon (TPoS), liquid phase sensing

Citation Format(s)

Self-Sustaining Square-Extensional Mode Resonator Oscillator for Mass Sensing in Liquid. / Begum, Habiba; Ali, Abid; Lee, Joshua En-Yuan.

Proceedings - EUROSENSORS 2018. Vol. 2 MDPI AG, 2018. 976.

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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