HIGH-Q LOW IMPEDANCE UHF-BAND ALN-ON-SI MEMS RESONATORS USING QUASI-SYMMETRICAL LAMB WAVE MODES
Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with host publication) › peer-review
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Related Research Unit(s)
Detail(s)
| Original language | English |
|---|---|
| Title of host publication | 2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) |
| Publisher | IEEE |
| Pages | 970-973 |
| Publication status | Published - Feb 2016 |
Publication series
| Name | Proceedings IEEE Micro Electro Mechanical Systems |
|---|---|
| Publisher | IEEE |
| ISSN (Print) | 1084-6999 |
Conference
| Title | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems |
|---|---|
| Place | China |
| City | Shanghai |
| Period | 24 - 28 January 2016 |
Link(s)
Abstract
This paper describes the phase velocity dispersion characteristics of Lamb waves propagating in A1N-on-Si plates, which achieves high quality factor (Q > 10000) and low motional resistance (R-m<50 Q) at 260 MHz in air by using the fundamental quasi -symmetrical (QS(0)) mode. We have found that the ratio of the Si layer thickness (h(si)) over the acoustic wavelength (lambda) sets a limit for the QS(0) mode resonance at higher frequencies as increasing the ratio of hsA reduces the electromechanical coupling for the QS(0) mode while enhancing the spurious quasi-antisymmetrical (QA(0)) mode. Lastly, we also experimentally demonstrate that using multiple tethers helps suppress spurious modes
Citation Format(s)
2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS). IEEE, 2016. p. 970-973 (Proceedings IEEE Micro Electro Mechanical Systems).
Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with host publication) › peer-review
