HIGH-Q LOW IMPEDANCE UHF-BAND ALN-ON-SI MEMS RESONATORS USING QUASI-SYMMETRICAL LAMB WAVE MODES

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Author(s)

Detail(s)

Original languageEnglish
Title of host publication2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
PublisherIEEE
Pages970-973
Publication statusPublished - Feb 2016

Publication series

NameProceedings IEEE Micro Electro Mechanical Systems
PublisherIEEE
ISSN (Print)1084-6999

Conference

Title2016 IEEE 29th International Conference on Micro Electro Mechanical Systems
PlaceChina
CityShanghai
Period24 - 28 January 2016

Abstract

This paper describes the phase velocity dispersion characteristics of Lamb waves propagating in A1N-on-Si plates, which achieves high quality factor (Q > 10000) and low motional resistance (R-m<50 Q) at 260 MHz in air by using the fundamental quasi -symmetrical (QS(0)) mode. We have found that the ratio of the Si layer thickness (h(si)) over the acoustic wavelength (lambda) sets a limit for the QS(0) mode resonance at higher frequencies as increasing the ratio of hsA reduces the electromechanical coupling for the QS(0) mode while enhancing the spurious quasi-antisymmetrical (QA(0)) mode. Lastly, we also experimentally demonstrate that using multiple tethers helps suppress spurious modes

Citation Format(s)

HIGH-Q LOW IMPEDANCE UHF-BAND ALN-ON-SI MEMS RESONATORS USING QUASI-SYMMETRICAL LAMB WAVE MODES. / Zhu, Haoshen; Tu, Cheng; LEE, Joshua E.-Y. .

2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS). IEEE, 2016. p. 970-973 (Proceedings IEEE Micro Electro Mechanical Systems).

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review