EXAFS measurements of metal-decorated nanocavities in Si
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Author(s)
Detail(s)
| Original language | English |
|---|---|
| Pages (from-to) | 179-184 |
| Journal / Publication | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 199 |
| Publication status | Published - Jan 2003 |
| Externally published | Yes |
Link(s)
Abstract
The metal-decorated nanocavities in Si were discussed using EXAFS measurements. A sample preparation methodology to enable the identification with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates was elaborated. The preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities were also presented.
Research Area(s)
- Cavities, EXAFS, Gettering, Silicon, Voids
Citation Format(s)
EXAFS measurements of metal-decorated nanocavities in Si. / Azevedo, G. de M.; Ridgway, M. C.; Betlehem, J. et al.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 199, 01.2003, p. 179-184.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 199, 01.2003, p. 179-184.
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
