Patterning of polyfluorene based polymer light emitting diodes by reversal imprint lithography

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Detail(s)

Original languageEnglish
Pages (from-to)2385-2389
Journal / PublicationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume26
Issue number6
Publication statusPublished - Nov 2008
Externally publishedYes

Conference

Title52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
Location
CityPortland, Oregan
Period27 - 30 May 2008

Abstract

The authors demonstrated the fabrication of patterned arrays of polymer light emitting diodes (PLEDs) with a polyfluorene based emissive layer using reversal imprint lithography. A stack of patterned metal and polymer films is transferred to a glass substrate in a single reversal imprint step. Two different techniques for coating the patterned Si mold are shown, one involving the spin coating of polymer layers directly onto the mold and one involving inking of the polymers onto the mold from a spin-coated PDMS inkpad. Using these techniques, PLED devices with a minimum feature sizes as small as 1 μm and luminescence starting at 3.5 V have been demonstrated.

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