Patterning of polyfluorene based polymer light emitting diodes by reversal imprint lithography
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Author(s)
Detail(s)
Original language | English |
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Pages (from-to) | 2385-2389 |
Journal / Publication | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 26 |
Issue number | 6 |
Publication status | Published - Nov 2008 |
Externally published | Yes |
Conference
Title | 52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
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Location | |
City | Portland, Oregan |
Period | 27 - 30 May 2008 |
Link(s)
Abstract
The authors demonstrated the fabrication of patterned arrays of polymer light emitting diodes (PLEDs) with a polyfluorene based emissive layer using reversal imprint lithography. A stack of patterned metal and polymer films is transferred to a glass substrate in a single reversal imprint step. Two different techniques for coating the patterned Si mold are shown, one involving the spin coating of polymer layers directly onto the mold and one involving inking of the polymers onto the mold from a spin-coated PDMS inkpad. Using these techniques, PLED devices with a minimum feature sizes as small as 1 μm and luminescence starting at 3.5 V have been demonstrated.
Citation Format(s)
Patterning of polyfluorene based polymer light emitting diodes by reversal imprint lithography. / Cardozo, B. L.; Pang, S. W.
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 26, No. 6, 11.2008, p. 2385-2389.
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 26, No. 6, 11.2008, p. 2385-2389.
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review