Reducing anchor loss in piezoelectric-on-silicon laterally vibrating resonators by combination of etched-slots and convex edges
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
Original language | English |
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Title of host publication | 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) |
Publisher | Institute of Electrical and Electronics Engineers, Inc. |
Pages | 2033-2036 |
ISBN (electronic) | 978-1-4799-8955-3 |
Publication status | Published - 21 Jun 2015 |
Conference
Title | 18th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2015) |
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Place | United States |
City | Anchorage, AK |
Period | 21 - 25 June 2015 |
Link(s)
Abstract
In this paper, we report enhancements by over 9 times in the quality factor (Q) of thin film piezoelectric-on-substrate (TPoS) MEMS resonators through engineering their acoustic modes. Specifically, we considered the effectiveness of using slots and convex curving of the resonator edges on reducing anchor loss to improve Q. The higher factor of improvement reported here compared to previously reported lamb-wave resonators based only Aluminum Nitride (AlN) and metal is likely due to lower interfacial losses when silicon is added to the structure, which also reduces thickness vibrations that are typical of lamb modes of vibration.
Citation Format(s)
Reducing anchor loss in piezoelectric-on-silicon laterally vibrating resonators by combination of etched-slots and convex edges. / Di, XIAO; LEE, Joshua E.-Y.
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). Institute of Electrical and Electronics Engineers, Inc., 2015. p. 2033-2036.
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). Institute of Electrical and Electronics Engineers, Inc., 2015. p. 2033-2036.
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review