Reducing anchor loss in piezoelectric-on-silicon laterally vibrating resonators by combination of etched-slots and convex edges

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Author(s)

Detail(s)

Original languageEnglish
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
PublisherIEEE
Pages2033-2036
ISBN (Electronic)978-1-4799-8955-3
Publication statusPublished - 21 Jun 2015

Conference

Title18th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2015)
PlaceUnited States
CityAnchorage, AK
Period21 - 25 June 2015

Abstract

In this paper, we report enhancements by over 9 times in the quality factor (Q) of thin film piezoelectric-on-substrate (TPoS) MEMS resonators through engineering their acoustic modes. Specifically, we considered the effectiveness of using slots and convex curving of the resonator edges on reducing anchor loss to improve Q. The higher factor of improvement reported here compared to previously reported lamb-wave resonators based only Aluminum Nitride (AlN) and metal is likely due to lower interfacial losses when silicon is added to the structure, which also reduces thickness vibrations that are typical of lamb modes of vibration.

Citation Format(s)

Reducing anchor loss in piezoelectric-on-silicon laterally vibrating resonators by combination of etched-slots and convex edges. / Di, XIAO; LEE, Joshua E.-Y.

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE, 2015. p. 2033-2036.

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review