3D Monte-Carlo model of deposition and grain growth in thin films
Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review
Author(s)
Detail(s)
| Original language | English |
|---|---|
| Pages (from-to) | 1281-1286 |
| Journal / Publication | Defect and Diffusion Forum |
| Volume | 237-240 |
| Issue number | PART 2 |
| Publication status | Published - 2005 |
| Externally published | Yes |
Link(s)
Abstract
To understand the cause of linear rate of grain growth under thin film deposition we have developed a 3D kinetic Monte-Carlo model which takes into account deposition of adatoms and their diffusion on a substrate, nucleation and growth of grains, migration of grainboundaries, surface diffusion at the "top" grain surface. Our simulation proves that the lateral grain growth under deposition is close to linear time law, which agrees with the experiment.
Research Area(s)
- Diffusion, Flux-Driven Grain Growth, Monte-Carlo Modeling, Nucleaticn, Thin Film Deposition
Bibliographic Note
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Citation Format(s)
3D Monte-Carlo model of deposition and grain growth in thin films. / Sobchenko, I. V.; Gusak, A. M.; Tu, K. N.
In: Defect and Diffusion Forum, Vol. 237-240, No. PART 2, 2005, p. 1281-1286.
In: Defect and Diffusion Forum, Vol. 237-240, No. PART 2, 2005, p. 1281-1286.
Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review
