QUALITY FACTOR ENHANCEMENT OF ALN-ON-SI LAMB WAVE RESONATORS USING A HYBRID OF PHONONIC CRYSTAL SHAPES IN ANCHORING BOUNDARIES

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with host publication) › peer-review

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Detail(s)

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Proceedings
PublisherIEEE
Pages913-916
ISBN (Electronic)978-1-5386-8104-6
ISBN (Print)978-1-7281-2007-2
Publication statusPublished - Jun 2019

Publication series

NameInternational Conference on Solid State Sensors and Actuators (TRANSDUCERS)
PublisherIEEE
ISSN (Print)2167-0013
ISSN (Electronic)2167-0021

Conference

Title2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
LocationEstrel Congress Center
PlaceGermany
CityBerlin
Period23 - 27 June 2019

Link(s)

DOI

DOI
Check@CityULib
Link to Scopus https://www.scopus.com/record/display.uri?eid=2-s2.0-85071945729&origin=recordpage
Permanent Link https://scholars.cityu.edu.hk/en/publications/publication(5c1db28b-d079-403e-91b9-5d031511ce5f).html

Abstract

This paper describes the novel use of a hybrid phononic crystal (PnC) array formed by two PnC shapes on anchoring boundaries of a 7th harmonic Lamb wave aluminum nitride on silicon (AlN-on-Si) resonator. We demonstrate the effect of the hybrid PnC in boosting Q to the order 104. The hybrid PnC array comprises a disk PnC with a wide acoustic bandgap (ABG) and a ring PnC as an intermediary routing layer for input/output (I/O) electrical feeds to more effectively reduce anchor loss. We show that the wide ABG disk PnC provides 47dB of acoustic attenuation in a Lamb wave delay line.

Research Area(s)

  • Microelectromechanical Systems, piezoelectric-on-silicon resonators, anchor loss, phononic crystals, acoustic bandgap, quality factor

Citation Format(s)

[ RIS ] [ BibTeX ]
QUALITY FACTOR ENHANCEMENT OF ALN-ON-SI LAMB WAVE RESONATORS USING A HYBRID OF PHONONIC CRYSTAL SHAPES IN ANCHORING BOUNDARIES. / Siddiqi, Muhammad Wajih Ullah; Lee, Joshua E.-Y.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Proceedings. IEEE, 2019. p. 913-916 W3P.007 (International Conference on Solid State Sensors and Actuators (TRANSDUCERS)).

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with host publication) › peer-review