Design and simulation of an angular-rate vibrating microgyroscope

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Original languageEnglish
Pages (from-to)241-256
Journal / PublicationSensors and Actuators, A: Physical
Issue number2
Publication statusPublished - 15 Oct 2004
Externally publishedYes


Microgyroscopes have several potential applications in the aerospace, automotive, defense and bio-medical engineering. The present work provides a detailed account of the design and simulation for a typical high-resolution comb-driven capacitively-sensed microgyroscope fabricated from SOI 40μm thick wafer. The results show that high sensitivity and resolution are possible by the use of a thicker device layer along with a larger sensing area. A thicker device layer not only increases sensitivity and resolution but also ensures higher pull-in voltages and lower pollution of sensing mode. Comparison of lumped mass/stiffness modeling versus finite element modeling, nonlinearity in the output response, electrostatic pull-in characteristics, and scaling characteristics of natural frequencies and pull-in voltages are some aspects that are discussed in detail. © 2004 Elsevier B.V. All rights reserved.

Research Area(s)

  • Angular-rate sensor, MEMS, Microgyroscope, Micromachined gyroscope, Rate-gyroscope, Rotational-rate sensor