Piezoresistive sensing in a strongly-coupled high Q Lamé mode silicon MEMS resonator-pair
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
Original language | English |
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Title of host publication | IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings |
Publisher | Institute of Electrical and Electronics Engineers, Inc. |
ISBN (electronic) | 978-1-4799-4915-1 |
Publication status | Published - May 2014 |
Conference
Title | 2014 IEEE International Frequency Control Symposium, IFCS 2014 |
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Place | Taiwan |
City | Taipei |
Period | 19 - 22 May 2014 |
Link(s)
Abstract
We present a 13 MHz strongly coupled bulk Lamé mode silicon MEMS resonator-pair with quality factor (Q) of 106 (i.e. f·Q product of 1.3×1013) in addition to a 28 dB increase in transduction by uniquely adapting the coupling spring as an integrated piezoresistor. Our device exploits and preserves the intrinsic high Q of the isochoric Lamé mode while also tapping into the high concentration of stress in the coupling spring as the pair of Lamé mode resonators is synchronized to resonate in phase. This concentration of stress along the coupling beam benefits the output transduction efficiency, which in turn results in enhancing overall transduction while preserving very high Q. Q of the device also remains stable with increasing bias current.
Research Area(s)
- Lamé mode, mechanical coupling, motional transconductance, piezoresistance, quality factor
Citation Format(s)
Piezoresistive sensing in a strongly-coupled high Q Lamé mode silicon MEMS resonator-pair. / Xu, Yuanjie; Zhu, Haoshen; Lee, Joshua E.-Y.
IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings. Institute of Electrical and Electronics Engineers, Inc., 2014. 6859868.
IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings. Institute of Electrical and Electronics Engineers, Inc., 2014. 6859868.
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review