Piezoresistive sensing in a strongly-coupled high Q Lamé mode silicon MEMS resonator-pair

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

2 Scopus Citations
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Author(s)

Detail(s)

Original languageEnglish
Title of host publicationIFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings
PublisherInstitute of Electrical and Electronics Engineers, Inc.
ISBN (electronic)978-1-4799-4915-1
Publication statusPublished - May 2014

Conference

Title2014 IEEE International Frequency Control Symposium, IFCS 2014
PlaceTaiwan
CityTaipei
Period19 - 22 May 2014

Abstract

We present a 13 MHz strongly coupled bulk Lamé mode silicon MEMS resonator-pair with quality factor (Q) of 106 (i.e. f·Q product of 1.3×1013) in addition to a 28 dB increase in transduction by uniquely adapting the coupling spring as an integrated piezoresistor. Our device exploits and preserves the intrinsic high Q of the isochoric Lamé mode while also tapping into the high concentration of stress in the coupling spring as the pair of Lamé mode resonators is synchronized to resonate in phase. This concentration of stress along the coupling beam benefits the output transduction efficiency, which in turn results in enhancing overall transduction while preserving very high Q. Q of the device also remains stable with increasing bias current. 

Research Area(s)

  • Lamé mode, mechanical coupling, motional transconductance, piezoresistance, quality factor

Citation Format(s)

Piezoresistive sensing in a strongly-coupled high Q Lamé mode silicon MEMS resonator-pair. / Xu, Yuanjie; Zhu, Haoshen; Lee, Joshua E.-Y.
IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings. Institute of Electrical and Electronics Engineers, Inc., 2014. 6859868.

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review