A PMMA-based micro pressure sensor chip using carbon nanotubes as sensing elements

Research output: Journal Publications and ReviewsRGC 22 - Publication in policy or professional journal

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Author(s)

Detail(s)

Original languageEnglish
Article numberTPa2
Pages (from-to)251-254
Journal / PublicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2005
Externally publishedYes

Conference

Title18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
PlaceUnited States
CityMiami Beach, FL
Period30 January - 3 February 2005

Abstract

A novel polymer-based MEMS pressure sensor was fabricated using bulk multi-walled carbon nanotube (MWNT) as piezoresistive sensing elements. The development of the pressure sensor includes fabrication of 300nm thick Polymethylmethacrylate (PMMA) diaphragms using SU8 molding/hot-embossing technique and AC electrophoretic manipulation of MWNT bundles on the diaphragms. We have measured the pressure-resistance dependency of these MWNT-based micro sensors and preliminary results indicated that the MWNT sensors were capable of sensing input pressure variations. Moreover, the I-V measurements of the resulting devices revealed that the nominal resistance of the sensing elements can be adjusted by annealing the MWNTs through electrical current heating, which offers a potential method for resistance-off set calibration. Based on these experimental evidences, we propose that carbon nanotubes (CNTs) is a novel material for fabricating micro pressure sensors on polymer substrates - which may serve as alternative sensors for silicon based pressure sensors when bio-compatibility and low-cost applications are required. © 2005 IEEE.

Citation Format(s)

A PMMA-based micro pressure sensor chip using carbon nanotubes as sensing elements. / Fung, Carmen K. M.; Zhang, Maggie Q. H.; Chan, Rosa H. M. et al.
In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2005, p. 251-254.

Research output: Journal Publications and ReviewsRGC 22 - Publication in policy or professional journal