High-Precise Metallic Helical Microstructure Fabrication by Rotational Nanorobotic Manipulation System With Tilted Mandrel Compensation

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

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Detail(s)

Original languageEnglish
Pages (from-to)214-223
Number of pages10
Journal / PublicationIEEE/ASME Transactions on Mechatronics
Volume29
Issue number1
Online published19 May 2023
Publication statusPublished - Feb 2024

Abstract

Metallic helical microstructures are significant components applied in many fields, such as mechatronics, photonics, microelectromechanical systems, and biomedical engineering, but their fabrication with high precision remains a challenge. Herein, we report a general controllable approach for high-precise micro metallic helical structure fabrication by a self-developed rotational nanorobotic manipulation system. To reduce the fabrication error induced from the tilted mandrel, first, we propose an end-effector trajectory planning method to precompensate the tilted angle during rotation. Further, a hybrid vision and position feedback strategy is also developed to automate the fabrication process for obtaining a helical structure with uniform pitch distance consequently. The experimental results verify that our method is able to fabricate various micro helical structures with different dimensions with high precision up to 6 μm (less than two pixel equivalent). The potential application of the helical structure as high-precise force sensor is also demonstrated for soft biomaterial (hemostatic sponges) characterization. This research paves an effective solution for the high-precise 3-D helical structure fabrication, which would prompt their applications in engineering and inspire other microstructure manufacturing as well. © 2023 IEEE.

Research Area(s)

  • 3-D metallic helical microstructure, Fabrication, Manipulators, Microstructure, micro–nano manipulation, micro–nano manufacturing, micro–nano robot, Spirals, Trajectory, Wires, Wrapping

Bibliographic Note

Publisher Copyright: IEEE

Citation Format(s)

High-Precise Metallic Helical Microstructure Fabrication by Rotational Nanorobotic Manipulation System With Tilted Mandrel Compensation. / Zhang, Tieshan; Ren, Hao; Li, Gen et al.
In: IEEE/ASME Transactions on Mechatronics, Vol. 29, No. 1, 02.2024, p. 214-223.

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review