Design of phononic crystal tethers for frequency-selective quality factor enhancement in AlN piezoelectric-on-silicon resonators
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
Original language | English |
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Title of host publication | Procedia Engineering |
Publisher | ELSEVIER |
Pages | 516-519 |
Volume | 120 |
ISBN (print) | 1877-7058 |
Publication status | Published - Sept 2015 |
Conference
Title | 29th European Conference on Solid-State Transducers, EUROSENSORS 2015 |
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Location | |
Place | Germany |
City | Freiburg |
Period | 6 - 9 September 2015 |
Link(s)
DOI | DOI |
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Attachment(s) | Documents
Publisher's Copyright Statement
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Link to Scopus | https://www.scopus.com/record/display.uri?eid=2-s2.0-84985034300&origin=recordpage |
Permanent Link | https://scholars.cityu.edu.hk/en/publications/publication(404dc434-db1f-49c4-8e52-cb889d25b7a3).html |
Abstract
In this work, we experimentally demonstrate frequency-selective improvement of unloaded quality factor (Qu) using one-dimensional (1D) phononic crystal (PnC) ring tethers in Aluminium Nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) micromechanical resonators. We show that the 1D-PnC tethers help boost Qu by 3 times specifically at the desired resonant modes that lie in the PnC stopband but not for resonant modes lying outside the PnC stopband. These results show that the 1D-PnCs serve as frequency-selective acoustic reflectors.
Research Area(s)
- Anchor loss, Micro-electro-mechanical systems (MEMS), Phononic crystal, Quality factor, Resonator
Citation Format(s)
Design of phononic crystal tethers for frequency-selective quality factor enhancement in AlN piezoelectric-on-silicon resonators. / Zhu, Haoshen; Lee, Joshua E.-Y.
Procedia Engineering. Vol. 120 ELSEVIER, 2015. p. 516-519.
Procedia Engineering. Vol. 120 ELSEVIER, 2015. p. 516-519.
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
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