Design of phononic crystal tethers for frequency-selective quality factor enhancement in AlN piezoelectric-on-silicon resonators

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Author(s)

Detail(s)

Original languageEnglish
Title of host publicationProcedia Engineering
PublisherELSEVIER
Pages516-519
Volume120
ISBN (Print)1877-7058
Publication statusPublished - Sep 2015

Conference

Title29th European Conference on Solid-State Transducers, EUROSENSORS 2015
Location
PlaceGermany
CityFreiburg
Period6 - 9 September 2015

Link(s)

Abstract

In this work, we experimentally demonstrate frequency-selective improvement of unloaded quality factor (Qu) using one-dimensional (1D) phononic crystal (PnC) ring tethers in Aluminium Nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) micromechanical resonators. We show that the 1D-PnC tethers help boost Qu by 3 times specifically at the desired resonant modes that lie in the PnC stopband but not for resonant modes lying outside the PnC stopband. These results show that the 1D-PnCs serve as frequency-selective acoustic reflectors.

Research Area(s)

  • Anchor loss, Micro-electro-mechanical systems (MEMS), Phononic crystal, Quality factor, Resonator

Citation Format(s)

Design of phononic crystal tethers for frequency-selective quality factor enhancement in AlN piezoelectric-on-silicon resonators. / Zhu, Haoshen; Lee, Joshua E.-Y.

Procedia Engineering. Vol. 120 ELSEVIER, 2015. p. 516-519.

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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