Quality factor improvement of piezoelectric MEMS resonator by the conjunction of frame structure and phononic crystals

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

13 Scopus Citations
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Author(s)

  • Fei-Hong Bao
  • Jing-Fu Bao
  • Lei-Lei Bao
  • Muhammad Ammar Khan
  • Xin Zhou
  • Qi-Die Wu
  • Ting Zhang
  • Xiao-Sheng Zhang

Detail(s)

Original languageEnglish
Article number111541
Journal / PublicationSensors and Actuators, A: Physical
Volume297
Online published5 Aug 2019
Publication statusPublished - 1 Oct 2019

Abstract

Recently, piezoelectric resonators fabricated by using MEMS (i.e., micro-electro-mechanical systems) technology have received increasing attention in a large and diverse set of applications, including sensors, filters and timing references. One of the critical challenges for the actual application of MEMS resonators is further improving their quality factors (Qs) to respond the urgent demand of performance enhancement. Herein, a strategy by employing suspended frame structure and phononic crystals (PnC) was proposed to reduce the energy dissipation, and thus AlN-on-SOI MEMS resonators with high Q were successfully implemented. The suspended frame structure isolates the mechanical vibration between the resonant body and the anchoring substrate, while PnC arrays serve as a frequency-selective reflector to reduce the energy leakage. The multi-physics finite-element-analysis (FEA) and the experimental comparison were employed to systematically investigate the underlying mechanisms of the energy dissipation reduction of the proposed strategy. The unloaded Qs (i.e., Qu) of proposed resonators achieved maximum 7.8-fold and 1.5-fold improvements compared with that of bared resonators and that of those with only suspended frame structure, respectively.

Research Area(s)

  • Energy dissipation, MEMS, Phononic crystals, Piezoelectric resonator, Quality factor

Citation Format(s)

Quality factor improvement of piezoelectric MEMS resonator by the conjunction of frame structure and phononic crystals. / Bao, Fei-Hong; Bao, Jing-Fu; Lee, Joshua En-Yuan et al.

In: Sensors and Actuators, A: Physical, Vol. 297, 111541, 01.10.2019.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review