Characterization and model validation of a micromechanical resonant magnetic field sensor

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

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Detail(s)

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages1859-1862
Publication statusPublished - 2013

Conference

Title17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS 2013)
PlaceSpain
CityBarcelona
Period16 - 20 June 2013

Link(s)

DOI

DOI
Check@CityULib
Link to Scopus https://www.scopus.com/record/display.uri?eid=2-s2.0-84891702087&origin=recordpage
Permanent Link https://scholars.cityu.edu.hk/en/publications/publication(20e80fe7-7824-4d6c-b602-05a6562f7495).html

Abstract

This paper presents an analysis and model verification of a silicon-on-insulator (SOI) micromechanical resonant magnetic field sensor. The sensing mechanism is based on the detection of resonant frequency shift due to a Lorentz force that is generated by the presence of a magnetic field. We analyze the effect of scaling on sensitivity, showing that sensitivity improves when the device is thinner. The measured sensitivity is 677ppm/T with an associated high quality factor of 37000 when the thickness of the device is 10μm. Calibration slopes of the sensitivity measured from devices of different thicknesses all agree well with our analytical model predictions. Based on the model, we envisage that sensitivity could be further improved to about 1.7%/T within fabrication technology limitations. © 2013 IEEE.

Research Area(s)

  • magnetic field sensor, MEMS resonator, sensitivity calibration

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Publication fingerprints text

100
Model Validation Keyphrases
100
Micromechanics Keyphrases
100
Resonant Magnetic F... Keyphrases
100
sensitivity INIS
100
sensors INIS
100
magnetic fields INIS
100
validation INIS
100
Magnetic Field Engineering
100
Silicon Material Science
60
devices INIS
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Citation Format(s)

[ RIS ] [ BibTeX ]
Characterization and model validation of a micromechanical resonant magnetic field sensor. / Zhang, W.; Lee, J. E Y.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 1859-1862 6627153.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review