Boosting the Quality Factor of Low Impedance VHF Piezoelectric-on-Silicon Lateral Mode Resonators Using Etch Holes

C. Tu; J. E.-Y Lee

doi:10.1016/j.proeng.2016.11.443

Boosting the Quality Factor of Low Impedance VHF Piezoelectric-on-Silicon Lateral Mode Resonators Using Etch Holes

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Overview

3 Scopus Citations

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Author(s)

C. Tu
J. E.-Y Lee

Related Research Unit(s)

Detail(s)

Original language	English
Title of host publication	Procedia Engineering
Publisher	ELSEVIER
Pages	1261-1264
Volume	168
ISBN (print)	1877-7058
Publication status	Published - Oct 2016

Publication series

Name
ISSN (Print)	1877-7058

Conference

Title	30th Eurosensors Conference, Eurosensors 2016
Place	Hungary
City	Budapest
Period	4 - 7 September 2016

Link(s)

DOI	DOI https://doi.org/10.1016/j.proeng.2016.11.443 Final Published version
	Check@CityULib
Attachment(s)	Documents 14355535.pdf Final Published version, 733 KB, PDF Publisher's Copyright Statement This full text is made available under CC-BY-NC-ND 4.0. https://creativecommons.org/licenses/by-nc-nd/4.0/
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-85010000298&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(181aec83-c545-4d93-bbb5-e51ce7bd8d44).html

Abstract

We report a unique method of using etch-holes to greatly improve the unloaded quality factor (Q_u) of VHF-band low impedance laterally vibrating AlN Thin-film Piezoelectric-on-Silicon (TPoS) MEMS resonators. We have validated the proposed method experimentally by applying it to fabricated devices with resonant frequencies of 105 MHz. Based on the experimental results of several fabricated samples, we show that the quality factors of the resonators consistently improve by almost four times using the proposed method. The experimental results are corroborated by finite-element (FE) simulations, which show that the holes re-distribute the strain energy in the resonator and suppress the movement in the supporting beam tethers. Less energy in the tethers leads to reduction of anchor loss and thus enhances Q_u.