Low temperature quality factor scaling of laterally-vibrating AlN piezoelectric-on-silicon resonators
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
Author(s)
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Detail(s)
Original language | English |
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Title of host publication | Procedia Engineering |
Publisher | ELSEVIER |
Pages | 7-10 |
Volume | 120 |
ISBN (print) | 1877-7058 |
Publication status | Published - Sept 2015 |
Conference
Title | 29th European Conference on Solid-State Transducers, EUROSENSORS 2015 |
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Location | |
Place | Germany |
City | Freiburg |
Period | 6 - 9 September 2015 |
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DOI | DOI |
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Attachment(s) | Documents
Publisher's Copyright Statement
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Link to Scopus | https://www.scopus.com/record/display.uri?eid=2-s2.0-84985001715&origin=recordpage |
Permanent Link | https://scholars.cityu.edu.hk/en/publications/publication(11cd31af-5c11-4cf6-95a1-ae35372ae592).html |
Abstract
We present empirical results showing that the quality factors (Q) of 48MHz Aluminium Nitride (AlN) thin-film piezoelectric-onsilicon (TPoS) resonators double as a result of cryogenic cooling them from room temperature to 78K. The increase in Qu leads to a corresponding 5dB reduction in insertion loss (IL) and a motional resistance as low as 154Ω. This temperature scaling effect on Q is however absent at shorter acoustic wavelengths (λ) for the same resonators vibrating at higher order modes (143MHz). This absence was also found to be the case for other resonators with interdigitated electrode layouts to transduce 3rd and 5th order vibration modes of similar λ (107MHz). These results suggest that reducing the ratio of λ to the resonator thickness (h) strongly determines the dominance of anchor losses that do not scale with temperature.
Research Area(s)
- Anchor loss, Cryogenic cooling, Piezoelectric-on-silicon resonators
Citation Format(s)
Low temperature quality factor scaling of laterally-vibrating AlN piezoelectric-on-silicon resonators. / Tu, C.; Lee, J. E.-Y.
Procedia Engineering. Vol. 120 ELSEVIER, 2015. p. 7-10.
Procedia Engineering. Vol. 120 ELSEVIER, 2015. p. 7-10.
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
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