Plasma implantation based surface modification of metals with single-implantation mode

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Original languageEnglish
Article number75
Pages (from-to)324-329
Journal / PublicationProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2005


TitleFifth International Conference on Thin Film Physics and Applications
Period31 May - 2 June 2004


Plasma ion implantation has proven to be an effective surface modification technique. Its biggest advantage is the capability to treat the objects with irregular shapes without complex manipulation of target holder. Many metal materials such as aluminum, stainless steel, tool steel, titanium, magnesium etc, has been treated using this technique to improve their wear-resistance, corrosion-resistance, fatigue-resistance, oxidation-resistance, bio-compatiblity etc. However in order to achieve thicker modified layers, hybrid processes combining plasma ion implantation with other techniques have been frequently employed. In this paper plasma implantation based surface modification of metals using single-implantation mode is reviewed.

Research Area(s)

  • Biocompatibility, Corrosion-resistance, Metals, Nitrogen plasma, Oxidation-resistance, Plasma ion implantation, Wear-resistance

Citation Format(s)