Novel platform for resonant sensing in liquid with fully-electrical interface based on an in-plane-mode piezoelectric-on-silicon resonator
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
Author(s)
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Detail(s)
Original language | English |
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Title of host publication | Procedia Engineering |
Publisher | ELSEVIER |
Pages | 1217-1220 |
Volume | 120 |
ISBN (print) | 1877-7058 |
Publication status | Published - Sept 2015 |
Conference
Title | 29th European Conference on Solid-State Transducers, EUROSENSORS 2015 |
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Location | |
Place | Germany |
City | Freiburg |
Period | 6 - 9 September 2015 |
Link(s)
DOI | DOI |
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Attachment(s) | Documents
Publisher's Copyright Statement
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Link to Scopus | https://www.scopus.com/record/display.uri?eid=2-s2.0-84985001784&origin=recordpage |
Permanent Link | https://scholars.cityu.edu.hk/en/publications/publication(0afd6f9d-7f97-47d2-a4ef-503624d178cc).html |
Abstract
In this paper, we experimentally demonstrate full electrical characterization (i.e. both electrical input and output) of a MEMS resonator that is fully immersed in water towards realizing a novel resonant sensing platform capable of operating in liquid. Operation in liquid for resonant sensing has always been a challenge for electrical characterization. Our approach combines the strong electromechanical coupling of piezoelectric transduction provided by Aluminium Nitride (AlN), lower viscous damping by exciting an in-plane vibration mode, and higher energy storage capacity provided by the silicon device layer that is much thicker than the AlN film. Our device shows a measured quality factor (Q) of 200 when fully-immersed in water, which is over 2 times that of previously reported resonators. We are able to extract the motional resistance of the device in water, which we have found to be 40.5kΩ
Research Area(s)
- Aluminum nitride, Feedthrough capacitance, Length extentional mode, MEMS resonator, Thin film piezoelectric-on-silicon
Citation Format(s)
Novel platform for resonant sensing in liquid with fully-electrical interface based on an in-plane-mode piezoelectric-on-silicon resonator. / Ali, Abid; Lee, Joshua E.-Y.
Procedia Engineering. Vol. 120 ELSEVIER, 2015. p. 1217-1220.
Procedia Engineering. Vol. 120 ELSEVIER, 2015. p. 1217-1220.
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
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