Novel platform for resonant sensing in liquid with fully-electrical interface based on an in-plane-mode piezoelectric-on-silicon resonator

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Detail(s)

Original languageEnglish
Title of host publicationProcedia Engineering
PublisherELSEVIER
Pages1217-1220
Volume120
ISBN (Print)1877-7058
Publication statusPublished - Sep 2015

Conference

Title29th European Conference on Solid-State Transducers, EUROSENSORS 2015
Location
PlaceGermany
CityFreiburg
Period6 - 9 September 2015

Link(s)

Abstract

In this paper, we experimentally demonstrate full electrical characterization (i.e. both electrical input and output) of a MEMS resonator that is fully immersed in water towards realizing a novel resonant sensing platform capable of operating in liquid. Operation in liquid for resonant sensing has always been a challenge for electrical characterization. Our approach combines the strong electromechanical coupling of piezoelectric transduction provided by Aluminium Nitride (AlN), lower viscous damping by exciting an in-plane vibration mode, and higher energy storage capacity provided by the silicon device layer that is much thicker than the AlN film. Our device shows a measured quality factor (Q) of 200 when fully-immersed in water, which is over 2 times that of previously reported resonators. We are able to extract the motional resistance of the device in water, which we have found to be 40.5kΩ

Research Area(s)

  • Aluminum nitride, Feedthrough capacitance, Length extentional mode, MEMS resonator, Thin film piezoelectric-on-silicon

Citation Format(s)

Novel platform for resonant sensing in liquid with fully-electrical interface based on an in-plane-mode piezoelectric-on-silicon resonator. / Ali, Abid; Lee, Joshua E.-Y.

Procedia Engineering. Vol. 120 ELSEVIER, 2015. p. 1217-1220.

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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