Parallel silicide contacts

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

197 Scopus Citations
View graph of relations

Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)3735-3739
Journal / PublicationJournal of Applied Physics
Volume51
Issue number7
Publication statusPublished - 1980
Externally publishedYes

Abstract

Parallel silicide contacts consisting of PtSi and NiSi with fixed ratios of contact areas were prepared for current-voltage and capacitance-voltage measurements of Schottky barrier height. These measurements were analyzed with models assuming a linear combination of thermionic emission currents or junction capacitances. The measured and the computed values of barrier height have been found to agree very well. A systematic diagnosis of parallel contacts under a variety of conditions is presented in the Appendix.

Bibliographic Note

Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

Citation Format(s)

Parallel silicide contacts. / Ohdomari, I.; Tu, K. N.
In: Journal of Applied Physics, Vol. 51, No. 7, 1980, p. 3735-3739.

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review